Electrochemically polishing conductive films on semiconductor wafers

ABSTRACT

An electropolish process may remove a conductive film from a semiconductor wafer. An electropolish apparatus having a pad over a platen may make surface-to-surface electrical contact with the conductive film of the wafer across the entire surface of the pad and the conductive film on the wafer. An electric field may be applied through openings in the pad and electrodes which receive potential by feedthroughs that extend through the platen to those electrodes. The electrodes in the feedthroughs may be electrically isolated from the pad and the platen. As a result, more uniform application of electrical potential across the surface to be polished may be achieved in some embodiments.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.10/722,801, filed on Nov. 26, 2003.

BACKGROUND

This invention relates generally to processing integrated circuits.

In the course of semiconductor wafer fabrication, a metal film formed ona semiconductor wafer may be polished. Conventionally, electrochemicalpolishing may be utilized. An abrasive fluid may be applied between themetal surface of the semiconductor wafer and a polishing platen. Apotential may be applied between the semiconductor wafer and thepolishing platen and the platen and semiconductor wafer may be counterrotated. As a result, the metal film may be polished.

Generally electropolish processes need uniform electrical contact to themetal film being polished. One limitation of electropolish processes isthat the electrical contact to the film is made via contact to the edgeof the wafer or at a few discrete points on the front of the wafer.

Thus, the electropolish process is dependent on the resistance of thefilm between the contact point and the area of the film being polished.As the film is thinned, the resistance of the film increases andeventually the film becomes discontinuous. As a result, the removalprocess is significantly slowed and may subsequently be halted in someareas.

Thus, conventional electropolish processes suffer from an inability toremove the entire metal film due to the increase in resistivity at theend of the process. Patches of metal may remain at the end of theconventional process.

Thus, there is a need for better ways to implement electrochemicalpolishing.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a side elevational view of one embodiment of the presentinvention;

FIG. 2 is a partial, greatly enlarged, top plan view of a portion of thepad in accordance with one embodiment of the present invention; and

FIG. 3 is an enlarged, partial, vertical, cross-sectional view through aportion of the wafer pad and platen shown in FIG. 1 in accordance withone embodiment of the present invention.

DETAILED DESCRIPTION

Referring to FIG. 1, a semiconductor wafer 10 with a downwardly facingconductive surface may be rotated in a first direction indicated by acounterclockwise arrow. An electropolish platen 14 and pad 12 may berotated in the opposite direction indicated by a clockwise arrow. As aresult, the conductive film on the wafer 10 may be electropolished.

In some cases, an abrasive polish fluid material may be used between thesemiconductor wafer 10 and the pad 12. Pressure may or may not beexerted.

Referring to FIG. 2, the upper surface of the pad 12 includes an arrayof regularly spaced, cut-out regions 16 a. In one embodiment, thesecut-out regions 16 a have the circular configuration shown in FIG. 2. Asa result, electrical contact may be made through the pad 12 to theconductive surface of the semiconductor wafer 10. At the same time, anelectric field may be applied through the cut-out region 16 a to theconductive surface of the semiconductor wafer 10. Therefore, electricalcontact can be made directly to the conductive film on the semiconductorwafer 10 and an electric field may still be applied to that wafer.

Referring to FIG. 3, the platen 14 may have a passage formedtherethrough which allows a feedthrough 20 to provide electricalcommunication to a counter electrode 16. The counter electrode 16 isexposed by the cut-out region 16 a formed in the pad 12. Thus, anelectrical potential may be supplied through the platen 14 (from thebottom side) to the electrode 16 to set up an electric field between theconductive film 22 of the semiconductor wafer 10 and the counterelectrode 16. The conductive film 22 may be a metal layer to be polishedin one embodiment.

An insulative film 24 separates the feedthrough 20 and the counterelectrode 16 from the pad 12 and the platen 14. In one embodiment, thepad 12 and the platen 14 are electrically conductive so that anelectrical potential may be conveyed through the platen 14 to the pad 12and thereafter to the film 22. Thus, the film 22 is at one polarity andthe counter electrode 16 is at another polarity, setting up an electricfield. The circularly shaped edge of the cut-out region 16 a may beeffective in providing a polishing action.

An electrical potential may be provided through the insulative film 24upwardly from below to the feedthrough 20 to the electrode 16 in oneembodiment of the present invention. A potential of the oppositepolarity is applied from below the platen 14 to the film 22 via theconductive platen 14 and pad 12, in one embodiment. The electric fieldbetween the film 22 and the counter electrode 16 may be proportional tothe voltage difference between the platen 14 and the electrode 16 in oneembodiment of the present invention. That electric field drives theelectrochemical polish process. The pad 12 serves the dual function ofproviding an abrasive surface, as well as electrical contact to the film22 being polished.

Thus, in some embodiments, uniform electrical contact may be made to thefilm 22 being polished. As a result, the electropolish process may beless dependent on the resistance of the film 22 because a wide contactsurface may be had between the film 22 and the pad 12 in someembodiments. As a result, the film 22 removal process may not besignificantly slowed or halted in some areas. This may improve theability to remove the entire film 22 in some embodiments.

While the present invention has been described with respect to a limitednumber of embodiments, those skilled in the art will appreciate numerousmodifications and variations therefrom. It is intended that the appendedclaims cover all such modifications and variations as fall within thetrue spirit and scope of this present invention.

1. A polishing pad for an electrochemical polishing process comprising: a conductive body and a plurality of regularly spaced openings through said body; and an electrode in said openings connectable to a potential, said electrode insulated from said body.
 2. The pad of claim 1 wherein said openings have a circular shape.
 3. The pad of claim 1 including an insulator between said electrode and said body.
 4. An electrochemical polishing apparatus comprising: a platen; a pad positioned over said platen, said pad being conductive; and a plurality of electrodes formed within openings in said pad, said electrodes being electrically isolated from said pad.
 5. The apparatus of claim 4 wherein said platen is electrically conductive.
 6. The apparatus of claim 4 including insulators to insulate said electrode electrically from said pad.
 7. The apparatus of claim 4 wherein said electrodes extend through said pad and said platen. 